GB/T 20176-2025
表面化学分析 二次离子质谱 用均匀掺杂物质测定硅中硼的原子浓度
Surface chemical analysis—Secondary-ion mass spectrometry—Determination of boron atomic concentration in silicon using uniformly doped materials
- 实施日期
- 2026-01-01
- ICS 分类
- 71.040.40
组合使用关键词、标准类型、状态与 ICS 分类,快速定位所需国家标准。
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GB/T 20176-2025
Surface chemical analysis—Secondary-ion mass spectrometry—Determination of boron atomic concentration in silicon using uniformly doped materials
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