GB/T 14847-2025
重掺杂衬底上轻掺杂硅外延层厚度的测试 红外反射法
Test method for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates—Infrared reflectance method
- 实施日期
- 2026-05-01
- ICS 分类
- 77.040
组合使用关键词、标准类型、状态与 ICS 分类,快速定位所需国家标准。
找到 70,494 条
GB/T 14847-2025
Test method for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates—Infrared reflectance method
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