GB/T 47082-2026
碳化硅单晶抛光片堆垛层错测试方法
Test method for stacking faults of polished monocrystalline silicon carbide wafers
- 实施日期
- 2026-08-01
- ICS 分类
- 77.040
组合使用关键词、标准类型、状态与 ICS 分类,快速定位所需国家标准。
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GB/T 47082-2026
Test method for stacking faults of polished monocrystalline silicon carbide wafers
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