GB/T 30866-2014
碳化硅单晶片直径测试方法
Test method for measuring diameter of monocrystalline silicon carbide wafers
- 实施日期
- 2015-02-01
- ICS 分类
- 29.045
组合使用关键词、标准类型、状态与 ICS 分类,快速定位所需国家标准。
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GB/T 30866-2014
Test method for measuring diameter of monocrystalline silicon carbide wafers
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GB/T 30844.1-2014
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GB/T 30843.2-2014
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